Systems and methods for electromagnetic interference shielding

ABSTRACT

Discussed generally herein are methods and devices including or providing an electromagnetic interference (EMI) shielding. A device can include a substrate including electrical connection circuitry therein, grounding circuitry on, or at least partially in the substrate, the grounding circuitry at least partially exposed from a surface of the substrate, a die electrically connected to the connection circuitry and the grounding circuitry, the die on the substrate, and a conductive foil or conductive film surrounding the die, the conductive foil or conductive film electrically connected to the grounding circuitry.

TECHNICAL FIELD

This disclosure relates generally to electromagnetic interference (EMI)shielding. One or more embodiments regard a manufacturing process toprovide an EMI shielding for an electronics package. One or moreembodiments regard the EMI shielded packages produced using one of themanufacturing processes.

BACKGROUND ART

Electromagnetic sources can generate electrical signals that can causeElectromagnetic interference (EMI). EMI is an electromagnetic wave orsignal generated by an external source that negatively affects acircuit. The electromagnetic wave or signal can affect the circuitthrough electromagnetic induction, electrostatic coupling, and/orconduction. The electromagnetic wave can degrade the performance of thecircuit or even stop it from functioning.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1G illustrate, by way of example, cross-section diagrams of anembodiment of a process for manufacturing a device with EMI shielding.

FIG. 1H illustrates, by way of example, a cross section diagram of anembodiment of a package created using a process discussed with regard toFIGS. 1A-1G.

FIG. 1I illustrates, by way of example, a perspective view diagram of anembodiment of an EMI shielded package created using a process discussedwith regard to FIGS. 1A-1G.

FIG. 1J illustrates, by way of example, a perspective view diagram ofanother embodiment of an EMI shielded package created using a processdiscussed with regard to FIGS. 1A-1G.

FIGS. 2A-2F illustrate, by way of example, cross-section diagrams ofanother embodiment of a process for manufacturing a device with EMIshielding.

FIGS. 3A-3D illustrate, by way of example, perspective view diagrams ofembodiments of grounding planes.

FIG. 4 shows a block diagram example of an electronic device which caninclude a component with EMI shielding.

DESCRIPTION OF EMBODIMENTS

The following description and the drawings sufficiently illustrateembodiments to enable those skilled in the art to practice them. Otherembodiments can incorporate structural, logical, electrical, process, orother changes. Portions and features of some embodiments can be includedin, or substituted for, those of other embodiments. Embodiments setforth in the claims encompass all available equivalents of those claims.

An EMI shielding for an electronics package (e.g., a molded or unmoldedsystem in package (SiP)) uses a physical vapor deposition (PVD)sputtering process to coat a mold surface with a conductive material.The sputtering process has some disadvantages, such as high cost of thesputtering equipment, increase in throughput time to increase sputteredconductive material thickness, complex process for uniform materialcoverage on package sidewalls, and mold surface pre clean to improveadhesion, among others.

Embodiments discussed herein provide EMI shielding for an electronicpackage, such as a system in package (SiP). Generally a metal foil orfilm is formed around the SiP such that the metal foil contacts one ormore ground pads (e.g., on or at least partially in the package surface)or one or more ground traces/planes of the SiP. Two manufacturingtechniques (each with multiple variations) are discussed herein. Thefirst process discussed is a manufacturing process for strip-levelmolded packages. In this process a foil or film is attached to a moldchase prior to mold fill. The second process discussed is amanufacturing process for singulated molded packages. In this process ametal foil or film is stamped, pressed, or otherwise formed around theSiP to make contact with the one or more grounding planes/traces exposedon the sides of the package substrate.

The manufacturing processes discussed herein can provide one or moreadvantages over prior EMI shielding techniques and/or devices with EMIshielding. An advantage can include avoiding sputtering and therelatively high costs associated therewith. Another advantage caninclude a reduced throughput time as compared to a sputtering process.

The two manufacturing processes are discussed in turn. The firstprocess, which can be useful for smaller packages normally fabricatedusing strip-level dies (among others), is discussed with regard to FIGS.1A-1J. The second process, which can be useful for singulated diepackages containing one or more devices (among others), is discussedwith regard to FIGS. 2A-2F. In the first process, a conductive foil orfilm is attached to a mold chase. The foil or film is then attached toground pads on a package substrate prior to optional molding. In thesecond process, a package is molded prior to foil or film attach.

A “foil” as used herein is a conductor, such as a substantially puremetal. A “film” as used herein is a combination of a dielectric material(e.g., an organic material) and a conductive material attached to eachother. The remaining discussion refers to foils. However, it is to beunderstood that a film can be used in place of a foil.

FIG. 1A illustrates, by way of example, a cross-section diagram of anembodiment of a system 100A for adhering a foil 104 to a mold chase. Thesystem 100A as illustrated includes a top mold chase 102A, a bottom moldchase 102B, a foil 104, and an adhesive 106.

The top mold chase 102A and the bottom mold chase 102B form a main bodyof a mold. The mold chase 102A-B is used to form the foil 104 to a shapedefined by the top mold chase 102A and the bottom mold chase 102B. Thetop mold chase 102A and the bottom mold chase 102B include mold cavityregisters to help ensure correct alignment of the mold chases 102A-B andto help ensure the foil 104 is formed to a desired shape.

The foil 104 can include a pliable (e.g., bendable, foldable,deformable, or the like) conductive material, such as copper, aluminum,gold, titanium, silver, stainless steel, a laminate conductive material,or a combination thereof, among others. A film, which can be used inplace of the foil 104, can include a foil attached to another layer ofmaterial, such as can include an organic material, such aspolypropylene, polyethylene terephthalate, and/or polyethylene, amongothers. The organic material of the film can be chosen for its bondingcharacteristics (its ability to be attached to the top mold chase 102Ausing the adhesive 106). Such configurations are beneficial when thefoil 104 alone does not bond well to the top mold chase 102A.

The adhesive 106 can be a thermal plastic or other adhesive that ispliable. The adhesive 106 generally has a weaker adhesive strength whenheated as compared to its adhesive strength at colder temperature.Example adhesives include glue(s), pressure sensitive adhesives, sprayadhesives, fabric adhesives, epoxy, and polyurethane, among others.

The adhesive 106 is situated on the foil 104. The foil 104 and adhesive106 combination is situated between the top mold chase 102A and thebottom mold chase 102B. The top and bottom mold chases 102A-B arepressed together in the direction of the arrows 108. The adhesive 106adheres the foil 104 to the top mold chase 102A. When the bottom moldchase 102B is pulled away from the top mold chase 102A the bond betweenthe adhesive 106, the top mold chase 102A and the foil 104 keeps thefoil 104 attached to the top mold chase 102A.

FIG. 1B illustrates a cross-section view diagram of an embodiment of asystem 100B that includes the system 100A after the bottom mold chase102B is pulled away from the top mold chase 102A. As previouslydiscussed, the bond between the adhesive 106, foil 104, and the top moldchase 102A keeps the foil 104 attached to the top mold chase 102A.

FIG. 1C illustrates a cross-section view diagram of an embodiment of asystem 100C that includes the system 100B with a strip 110 of packages112 situated under the top mold chase 102A with the foil 104 attachedthereto. The strip 110 includes a plurality of packages 112 attachedthereto. The strip 110 is different from a wafer. A wafer is a medium onwhich dies are formed, while a strip includes packaged dies (i.e.packages) situated thereon or at least partially therein. The strip 110can include a substrate, such as can include a plurality of build-uplayers, such as can include bumpless buildup layers. The substrate caninclude electrical connection circuitry at least partially thereinand/or thereon. The electrical connection circuitry can include one ormore traces, vias, or other conductive circuitry to connect to diecircuitry in the package 112.

The strip 110 can include traces 120, pads 116, and other circuitrytherein to connect to circuitry of the package 112, such as throughconnections 118. The pads 116 are ground connected, such as to a groundof the package, such as through the trace(s) 120 and/or a ground planeof the strip 110. Each of the pads 116 includes some conductive adhesive114 thereon. The conductive adhesive can include tin, copper, nickel,gold, indium, silver, antimony, aluminum, oxides thereof, or a compositeof a thermosetting epoxy and a metal. In one or more embodiments, theconductive adhesive is a solder. The packages 112 can be flip-chip, wirebond, or otherwise attached to the strip 110, such as through theconnections 118.

FIG. 1D illustrates a cross-section view of a system 100D that includesthe system 100C after the top mold chase 102A and attached foil 104 havebeen pressed onto the strip 110. Heat can be applied to the system 100D.The heat can melt the solder or activate the conductive adhesive 114.The heat can reduce a bond between the foil 104 and the adhesive 106,such as to allow the foil 104 to be detached from the top mold chase102A.

The system 100D can be cooled. Cooling the system 100D can harden thesolder or solidify an electrical connection between the conductiveadhesive 114 and the foil 104, such as to form a bond between the foil104 and conductive adhesive 114 that is stronger than the bond betweenthe foil 104 and the adhesive 106. Thus, the foil 104 can remainattached to the pad 116 through the conductive adhesive 114 when the topmold chase 102A is removed therefrom.

FIG. 1E illustrates a system 100E that includes the system 100D after anoptional molding material 126 is injected on and around the package 112.The molding material 126 is an insulating material, such as can includeepoxy resins that are thermoplastic or thermosets, such as cresolnovolac or bisphenol. Additionally or alternatively, the moldingmaterial 126 can include inorganic filler, catalyst, flame retardant,stress modifier, and/or an adhesion promoter, among others. The moldingmaterial 126 provides a support structure for the foil 104. The moldingmaterial 126 can help prevent electrical connections (traces, pads,vias, or the like) from shorting.

The molding material 126 can be injected through a mold runner 123, suchas shown in FIG. 1F. A mold vent 125 can allow air to escape duringmolding material 126 injection. FIG. 1F illustrates a cross-sectiondiagram of an embodiment of a system 100F that includes the mold runner123 and the mold vent 125.

FIG. 1G illustrates an embodiment of a system 100G that includes thesystem 100E or 100F after the top mold chase 102A has been removed andduring a die singulation process. The foil 104 is attached to the pad116 through the conductive adhesive 114. Conductive connectors 122 canbe attached to the strip 110, such as before or after the diesingulation process. The conductive connectors 122 can include ball gridarray (BGA), land grid array, or other electrical connections. Theconductive connectors 122 can be electrically coupled or connected toconnection circuitry in the strip 110 and/or one or more of theconnections 118.

The die singulation process can include cutting all the way through thestrip 110 to separate packages 112 and associated connection circuitryin the strip 110. The die singulation can be performed with a saw,bevel, laser ablation, scribe and cleave, or the like. A die packagesingulated with a portion of the strip 110 and with or without theconnectors 122 is sometimes referred to as a SiP herein.

FIG. 1H illustrates a system 100H that includes a package 112 with EMIshielding. The foil 104 attached to the grounding pads 116 provides agrounded EMI shielding around the package 112, such as to help reduce anamount of EMI on the die package 112. The foil 104 can at leastpartially surround the package 112, such as to surround the die package112 on up to five sides (any sides with the exception of the bottom sidewhere the package 112 is attached to the connections 118).

FIG. 1I illustrates, by way of example, a perspective view diagram of anembodiment of a system 100I that is an embodiment of the system 100Hviewed in the direction of arrow labelled “1I/1J” in FIG. 1H. The foil104 and conductive adhesive 114 are transparent so as to not obscure aview of the grounding pads 116. In one or more embodiments, thegrounding pads 116 can be situated around the package 112, such as toprovide multiple connection points for the foil 104. The grounding pads116 help keep the foil 104 attached to the strip 110, such as tocompletely surround the package 112.

FIG. 1J illustrates, by way of example, a perspective view diagram of anembodiment of a system 100J that is an embodiment of the system 100Hviewed in the direction of arrow labelled “1I/1J” in FIG. 1H. In theembodiment of the system 100J, the grounding pad 116 is a singleconductive pad around an entire perimeter of the package 112.

FIG. 2A illustrates, by way of example, a cross-section diagram of anembodiment of a system 200A for EMI shielding. The system 200A asillustrated includes multiple SiPs on a carrier 232 that is on aredistribution panel 234. The carrier 232 can be coupled to theredistribution panel 234 through a tacky material 233.

Each of the SiPs, as illustrated, includes a substrate 228, a package112, and a molding material 126 over and around the package 112 andbetween the connections 118 (connections not labelled in FIG. 2A so asto not obscure the view, see FIGS. 1C-1H for a view of the connections118). Each of the packages includes the connectors 122 attached thereto.In the embodiments of the FIGS. 1A-1J, the substrate is provided by thestrip 110.

A ground plane 230 is situated in the substrate 228. The ground plane230 can include a variety of shapes, such as one of those shown in FIGS.3A-3D, among others. The die packages 112 are electrically coupled tothe ground plane 230 through the traces 120.

The carrier 232 is a material that provides an area on which thepackages can be placed and pressed between a mold chase 236 and theredistribution panel 234, such as without slipping or damaging theconnectors 122. The carrier 232 can include an elastomeric material,such as to help cushion the packages under pressure from the top moldchase 236 (see FIG. 2B).

The tacky material 233 (e.g., an adhesive) can be coated or otherwisesituated on the redistribution panel 234. The tacky material 233 caninclude a thermal release tape, thermoplastic, polyimide adhesive film,Poly-vinyl chloride (PVC) film, pressure sensitive acrylic basedadhesive, ultra-violet (UV) release film, and/or a polyester basedadhesive, among others. Objects can be coupled to the redistributionpanel 234 through the tacky material 233.

The redistribution panel 234 is a sheet of material on which packagesare placed in specific (precise) x-y locations. The redistribution panel234 can include a material on which the carrier 232 can be adhered orsituated. The redistribution panel 234 is a relatively rigid materialthat can be transported without deforming or altering the location ofthe packages on the carrier 232.

FIG. 2B illustrates, by way of example, a cross-section diagram of anembodiment of a system 200B for adhering a foil 104 to a SiP. The system200B as illustrated includes the top mold chase 236, the foil 104, andthe conductive adhesive 114. The top mold chase 236 is used to form thefoil 104 to a shape defined by the top mold chase 236 and the SiP. Thetop mold chase 236 is pressed on the SiPs in the direction of arrows238. The conductive adhesive 114 contacts the grounding plane 230 andforms an electrical path between the foil 104 and the grounding plane230. While FIG. 2B illustrates the conductive adhesive 114 as being onthe foil 104, the conductive adhesive 114 can alternatively be situatedon edges of the grounding plane 230.

FIG. 2C illustrates, by way of example, a cross-section diagram of anembodiment of a system 200C that includes the system 200B after the topmold chase 236 is pressed to adhere the foil 104 to the grounding plane230. Heat can be applied to the system 200B and/or 200C to activate theconductive adhesive 114. The system 200C can be cooled, such as tosolidify a bond between the foil 104 and the grounding plane 230 formedby the conductive adhesive 114. FIG. 2D illustrates, by way of example,a cross-section diagram of an embodiment of a system 200D that includesthe system 200C after the top mold chase 236 is removed therefrom.

FIG. 2E illustrates, by way of example, a system 200E that includes thesystem 200D during a die singulation process. The die singulationprocess can include cutting all the way through the foil 104 and theadhesive 114 to separate the SiPs. The die singulation can be performedwith saw, bevel, laser ablation, scribe and cleave, or the like.

FIG. 2F illustrates a system 200F that includes a SiP with EMIshielding. The foil 104 attached to the grounding plane 230 (via theconductive adhesive 114) provides a grounded shielding at leastpartially around the package 112, such as to help reduce an amount ofEMI that affects the SiP. The foil 104 can at least partially surroundthe package 112. In the embodiment illustrated in FIG. 2F, the foil 104surrounds the entire package except for a bottom surface of thesubstrate 228 (the surface on which the connectors 122 are attached).

The process illustrated in FIGS. 2A-2E produces a system with adifferent configuration than the process illustrated in FIGS. 1A-G. Forexample, the foil 104 of the process of FIGS. 2A-2E need not have themold runner 123 or the mold vent 125 because the package is molded priorto foil attach. Another example difference includes the attachmentlocation of the foil 104. In the system 100H, the foil 104 is attachedto a grounding pad 116 exposed at a top surface of the strip 110, whilein the system 200F, the foil 104 is attached to a grounding plane 230that is under the surface of the substrate 228 and exposed at edges ofthe substrate 228.

FIGS. 3A, 3B, 3C, and 3D illustrate, by way of example, variousembodiments of grounding planes 230A, 230B, 230C, and 230Dconfigurations, respectively. FIG. 3A illustrates, by way of example, anembodiment of a grounding plane 230A that spans an entirety of a layerof the substrate 228. In such an embodiment, a via 334 and a dielectricisolation 336 can be used to pass signals through the grounding plane230A.

FIG. 3B illustrates, by way of example, an embodiment of a groundingplane 230B that does not span an entirety of a layer of the substrate228. In such an embodiment, vias 334 outside of the grounding plane 230Bcan pass between layers without needing to pass through the groundingplane 230B.

FIGS. 3C and 3D illustrate, by way of example, of embodiments ofgrounding planes 230C and 230D that include irregular configurations.Such embodiments are intended to illustrate that the grounding plane 230can take any general form as long as it is exposed along edges of thesubstrate 228.

Using a film or foil in place of a sputtered material as described withregard to the preceding FIGS. provides a more robust (e.g., stronger,harder to break, more reliable, or the like) EMI shielding. Unlike withsputtering material, a wider variety of metal and/or alloy compositionscan be used. Using a film or foil, the thickness of the EMI shielding isnot limited like it is using a sputtered material. The foil or film isgenerally denser and has fewer defects, such as voids, cracks, or otherdefects. Such defects can be detected using a microscope or inspectionby the naked eye. The foil or film generally has a more uniformthickness over a curved surface as compared to a sputtered material.Such differences make the foil or film as discussed herein physicallydifferent from a sputtered material. Such differences can be detected bythe naked eye or with the aid of a microscope.

FIG. 4 shows a block diagram example of an electronic device which caninclude an EMI shielding as disclosed herein. An example of anelectronic device using one or more packages with one or more higherresistance via is included to show an example of a device applicationfor the present disclosure. Electronic device 400 is merely one exampleof a device in which embodiments of the present disclosure can be used.Examples of electronic devices 400 include, but are not limited to,personal computers, tablet computers, supercomputers, servers,telecommunications switches, routers, mobile telephones, personal dataassistants, MP3 or other digital music players, radios, or the like.

In the example of FIG. 4, electronic device 400 comprises a dataprocessing system that includes a system bus 402 to couple the variouscomponents of the system. System bus 402 provides communications linksamong the various components of the electronic device 400 and can beimplemented as a single bus, as a combination of busses, or in any othersuitable manner.

An electronic assembly 410 is coupled to system bus 402. The electronicassembly 410 can include a circuit or combination of circuits. In oneembodiment, the electronic assembly 410 includes a processor 412 whichcan be of any type. As used herein, “processor” means any type ofcomputational circuit, such as but not limited to a microprocessor, amicrocontroller, a complex instruction set computing (CISC)microprocessor, a reduced instruction set computing (RISC)microprocessor, a very long instruction word (VLIW) microprocessor, agraphics processor, a digital signal processor (DSP), multiple coreprocessor, or any other type of processor or processing circuit.

Other types of circuits that can be included in electronic assembly 410are a custom circuit, an application-specific integrated circuit (ASIC),or the like, such as, for example, one or more circuits (such as acommunications circuit 414) for use in wireless devices like mobiletelephones, pagers, personal data assistants, portable computers,two-way radios, and similar electronic systems. The IC can perform anyother type of function.

The electronic device 400 can include an external memory 420, which inturn can include one or more memory elements suitable to the particularapplication, such as a main memory 422 in the form of random accessmemory (RAM), one or more hard drives 424, and/or one or more drivesthat handle removable media 426 such as compact disks (CD), digitalvideo disk (DVD), and the like.

The electronic device 400 can also include a display device 416, one ormore speakers 418, and a keyboard and/or controller 430, which caninclude a mouse, trackball, touch screen, voice-recognition device, orany other device that permits a system user to input information intoand receive information from the electronic device 400.

Additional Notes and Examples

In Example 1 a device with electromagnetic interference (EMI) shieldingcan include a substrate including electrical connection circuitrytherein, grounding circuitry on, or at least partially in the substrate,the grounding circuitry at least partially exposed from a surface of thesubstrate, a die electrically connected to the connection circuitry andthe grounding circuitry, the die on the substrate, and a conductive foilor conductive film surrounding the die, the conductive foil orconductive film electrically connected to the grounding circuitry.

In Example 2 the device of Example 1 can include, wherein the conductivefoil or conductive film surrounds the die package on five sides of thedie.

In Example 3 the device of at least one of Examples 1-2 can include,wherein the conductive foil or conductive film is a conductive foil.

In Example 4 the device of at least one of Examples 1-2 can include,wherein the conductive foil or conductive film is a conductive film.

In Example 5 the device of at least one of Examples 1-4 can include,wherein the grounding circuitry is a grounding plane in the substrate.

In Example 6 the device of at least one of Examples 1-4 can include,wherein the grounding circuitry is one or more grounding pads on a topsurface of the substrate, the top surface of the substrate facing thedie.

In Example 7 the device of at least one of Examples 1-6 can include oneor more solder balls electrically and mechanically connected to a bottomsurface of the substrate, the bottom surface of the substrate oppositea/the top surface of the substrate.

In Example 8 the device of at least one of Examples 1-7 can include amold runner hole and a mold vent hole in the conductive foil or theconductive film, and a molding material on and around the die, themolding material in contact with the die and the conductive foil orfilm.

In Example 9 the device of at least one of Examples 1-5 and 7-8 caninclude, wherein the grounding circuitry is a grounding plane and thedevice further comprises a layer of conductive adhesive between theconductive foil or conductive film and the grounding plane, theconductive foil or conductive film and the substrate, and the conductivefoil or conductive film and the molding material.

In Example 10 a method for providing electromagnetic interference (EMI)shielding for a System in Package (SiP) can include pressing an adhesiveand a conductive foil or conductive film onto a mold chase so as toadhere the conductive foil to the mold chase, aligning a strip of dieswith the mold chase, pressing the mold chase with the conductive foiladhered thereto onto the strip of dies to form and electrical connectionbetween the conductive foil and grounding pads on the strip, injectingmolding material between the conductive foil or conductive film and thedies after pressing the mold chase onto the strip, and singulating thedies from the strip.

In Example 11 the device of Example 10 can include heating solder on thegrounding pads to melt the solder, and cooling the solder to solidifythe electrical connection between the conductive foil or conductive filmand the grounding pads.

In Example 12 the device of at least one of Examples 10-11 can includeheating the adhesive to reduce a bond strength between the conductivefoil or conductive film and the mold chase.

In Example 13 the device of at least one of Examples 10-12 can include,wherein injecting the molding material includes injecting the moldingmaterial into a mold runner hole in the conductive film or conductivefoil.

In Example 14 the device of at least one of Examples 10-13 can includeelectrically connecting solder balls to a bottom surface of the stripbefore singulating the dies, the bottom surface of the strip opposite asurface of the strip on which the conductive foil or conductive film iselectrically connected.

In Example 15 the device of at least one of Examples 10-14 can includeelectrically connecting solder balls to a bottom surface of the stripafter singulating the dies, the bottom surface of the strip opposite asurface of the strip on which the conductive foil or conductive film iselectrically connected.

In Example 16 a method for providing electromagnetic interference (EMI)shielding for a System in Package (SiP) can include situating aconductive film or conductive foil under a mold chase, aligning aredistribution panel with dies thereon with the mold chase, each of thedies including a molding material around a respective die, pressing themold chase towards the redistribution panel to form an electricalconnection between the conductive foil or conductive film and thegrounding planes of the dies, and singulating the die packages bycutting through the conductive foil or conductive film betweenrespective dies.

In Example 17 the device of Example 16 can include, wherein theconductive foil or conductive film includes a layer of conductiveadhesive on a surface of the conductive foil or conductive film facingthe dies.

In Example 18 the device of Example 17 can include, wherein afterpressing the mold chase towards the redistribution panel the conductiveadhesive is further situated between the conductive foil or conductivefilm and the molding material of the dies.

In Example 19 the device of Example 16 can include, wherein thegrounding planes include conductive adhesive thereon prior to pressingthe mold chase towards the redistribution panel and the conductive foilor conductive film does not include conductive thereon prior to pressingthe mold chase towards the redistribution panel to form the electricalconnection between the conductive foil or conductive film and thegrounding planes.

In Example 20 the device of at least one of Examples 16-19 can includesituating the dies on a carrier on the redistribution panel, the carrierincluding an elastomeric material to protect the dies while pressing themold chase.

The above description of embodiments includes references to theaccompanying drawings, which form a part of the description ofembodiments. The drawings show, by way of illustration, specificembodiments in which the invention can be practiced. These embodimentsare also referred to herein as “examples.” Such examples can includeelements in addition to those shown or described. However, the presentinventors also contemplate examples in which only those elements shownor described are provided. Moreover, the present inventors alsocontemplate examples using any combination or permutation of thoseelements shown or described (or one or more aspects thereof), eitherwith respect to a particular example (or one or more aspects thereof),or with respect to other examples (or one or more aspects thereof) shownor described herein.

In this document, the terms “a” or “an” are used, as is common in patentdocuments, to include one or more than one, independent of any otherinstances or usages of “at least one” or “one or more.” In thisdocument, the term “or” is used to refer to a nonexclusive or, such that“A or B” includes “A but not B,” “B but not A,” and “A and B,” unlessotherwise indicated. In this document, the terms “including” and “inwhich” are used as the plain-English equivalents of the respective terms“comprising” and “wherein.” Also, in the following claims, the terms“including” and “comprising” are open-ended, that is, a system, device,article, composition, formulation, or process that includes elements inaddition to those listed after such a term in a claim are still deemedto fall within the scope of that claim. Moreover, in the followingclaims, the terms “first,” “second,” and “third,” etc. are used merelyas labels, and are not intended to impose numerical requirements ontheir objects.

The above description is intended to be illustrative, and notrestrictive. For example, the above-described examples (or one or moreaspects thereof) can be used in combination with each other. Otherembodiments can be used such as by one of ordinary skill in the art uponreviewing the above description. The Abstract is provided to allow thereader to quickly ascertain the nature of the technical disclosure. Itis submitted with the understanding that it will not be used tointerpret or limit the scope or meaning of the claims. Also, in theabove description of embodiments, various features can be groupedtogether to streamline the disclosure. This should not be interpreted asintending that an unclaimed disclosed feature is essential to any claim.Rather, inventive subject matter can lie in less than all features of aparticular disclosed embodiment. Thus, the following claims are herebyincorporated into the description of embodiments, with each claimstanding on its own as a separate embodiment, and it is contemplatedthat such embodiments can be combined with each other in variouscombinations or permutations. The scope of the invention should bedetermined with reference to the appended claims, along with the fullscope of equivalents to which such claims are entitled.

What is claimed is:
 1. A device with electromagnetic interference (EMI)shielding, the device comprising: a substrate including electricalconnection circuitry therein; grounding circuitry on, or at leastpartially in the substrate, a portion of the grounding circuitry atleast partially exposed from a surface of the substrate; a dieelectrically connected to the connection circuitry and the groundingcircuitry, the die on the substrate, the die including an activesurface, a non-active surface opposite the active surface, and sidesperpendicular to the active and non-active surfaces, wherein thegrounding circuitry includes discrete grounding pads surrounding thedie; a conductive foil or conductive film surrounding the die, theconductive foil or conductive film electrically connected to each of thegrounding pads of the grounding circuitry; a molding material in directphysical contact with the active surface the non-active surface, andsides of the die; electrical connections in direct physical contact withthe molding material, physically between the die and the substrate, andelectrically connected between the die and the grounding circuitry; andwherein the grounding circuitry further includes a grounding plane inthe substrate, and the device further comprises a conductive adhesivebetween and in direct physical contact with (a) the conductive foil orconductive film and the grounding plane, (b) the conductive foil orconductive film and the substrate, and (c) the conductive foil orconductive film and the molding material, the conductive adhesivephysically between the non-active surface and the sides of the die andthe conductive foil or conductive film.
 2. The device of claim 1,wherein the conductive foil or conductive film and the conductiveadhesive surround the die on all sides and the non-active surface of thedie.
 3. The device of claim 1, wherein the conductive foil or conductivefilm is a conductive foil.
 4. The device of claim 1, wherein theconductive foil or conductive film is a conductive film.
 5. The deviceof claim 1, wherein the grounding circuitry further includes one or moregrounding pads on a top surface of the substrate, the top surface of thesubstrate facing the active surface of the die.
 6. The device of claim5, further comprising one or more solder balls electrically andmechanically connected to a bottom surface of the substrate, the bottomsurface of the substrate opposite the top surface of the substrate. 7.The device of claim 1, further comprising: a mold runner hole and a moldvent hole in the conductive foil or the conductive film.